Topology optimization of MEMS resonators with target eigenfrequencies and modes

In this paper we present a density based topology optimization approach to the synthesis of industrially relevant MEMS resonators. The methodology addresses general resonators employing suspended proof masses or plates, where first structural vibration modes are typically interest and have match specific target eigenfrequencies. As significant practical example consider gyroscope applications, drive sense eigenfrequencies prescribed, as well an adequate distance spurious from operational frequency range. 3D dynamics structure analysed through Mindlin shell finite elements numerically efficient design procedure is obtained use model order reduction techniques on combination multi-point constraints, static approximations reduction. Manufacturability optimized designs ensured by imposing minimum length scale geometric features defining layout. Using deterministic, gradient-based mathematical programming, method applied both single mass tuning fork It demonstrated that proposed capable meeting frequencies corresponding fulfilling common industrial requirements.